A single nanopore structure that embeds all components of an electrochemical storage device could bring about the ultimate miniaturization in energy storage. Self-alignment of electrodes within each nanopore may enable closer and more controlled spacing between electrodes than in state-of-art batteries.
Here is an array of nanobatteries connected in parallel, each composed of an anode, a cathode and a liquid electrolyte confined within the nanopores of anodic aluminum oxide, as an all-in-one nanosize device.
Nature Nanotechnology 2014, 9(12): p. 1031-1039.
Nanopore batteries enabled by atomic layer deposition (ALD)
nanopore batteries contacted in parallel with each other
Modify graphene electrical properties by ALD
Back-gated graphene FETs for valuating graphene carrier density and mobility change after ALD deposition.
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Pt ALD improves electrical conductivity of graphene flake thin film.
field effect transistor made from pristine exfoliated graphene
Pt ALD improves electrical conductivity of graphene flake thin film.
Vacuum equipment design and process development
An evaporator integrated with an Ar glove box enables thin film deposition of air-sensitive lithium metal
It is used for Ru deposition inside high aspect ratio nanopores as current collector.
An evaporator integrated with an Ar glove box enables thin film deposition of air-sensitive lithium metal
I designed and built an evaporator integrated to an Ar glove box, which enables air-sensitive lithium metal deposition.
ALD process involved in my research:
Pt
Ru
SnO2
V2O5
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